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Patent family 56621415

This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.

Patent family metadata
Field	Value
Family ID	56621415
Family type	—
Earliest priority	Feb 18, 2015
First filing country	US
Member publications	6
Countries	US
Representative publication	US11610790B2 — Substrate processing apparatus

Representative publication

Best representative member for this family based on priority and filing country.

US11610790B2 — Substrate processing apparatus (published Mar 21, 2023)

Related publications in this family.