Lithography apparatus, control method therefor, and method of manufacturing article
US-10583608-B2 · Mar 10, 2020 · US
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Patent family 56566749
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 56566749 |
| Family type | — |
| Earliest priority | Feb 9, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10583608B2 — Lithography apparatus, control method therefor, and method of manufacturing article |
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US10583608B2 — Lithography apparatus, control method therefor, and method of manufacturing article (published Mar 10, 2020)
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