CMP composition for silicon nitride removal
US-9803109-B2 · Oct 31, 2017 · US
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Patent family 56552860
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 56552860 |
| Family type | — |
| Earliest priority | Feb 3, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9803109B2 — CMP composition for silicon nitride removal |
Representative publication
Best representative member for this family based on priority and filing country.
US9803109B2 — CMP composition for silicon nitride removal (published Oct 31, 2017)
Member publications
Related publications in this family.
Cmp composition for silicon nitride removal
US-2016222254-A1 · Aug 4, 2016 · US