Semiconductor element cleaning solution that suppresses damage to tantalum-containing materials, and cleaning method using same
US-10160938-B2 · Dec 25, 2018 · US
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Patent family 55954125
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 55954125 |
| Family type | — |
| Earliest priority | Nov 13, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10160938B2 — Semiconductor element cleaning solution that suppresses damage to tantalum-containing materials, and cleaning method using same |
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US10160938B2 — Semiconductor element cleaning solution that suppresses damage to tantalum-containing materials, and cleaning method using same (published Dec 25, 2018)
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