Substrate cleaning apparatus and substrate cleaning method
US-10163664-B2 · Dec 25, 2018 · US
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Patent family 55856929
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 55856929 |
| Family type | — |
| Earliest priority | Oct 31, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10163664B2 — Substrate cleaning apparatus and substrate cleaning method |
Representative publication
Best representative member for this family based on priority and filing country.
US10163664B2 — Substrate cleaning apparatus and substrate cleaning method (published Dec 25, 2018)
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Substrate cleaning apparatus and substrate cleaning method
US-2017316960-A1 · Nov 2, 2017 · US