Method for flattening sample in optical metrology
US-10006839-B2 · Jun 26, 2018 · US
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Patent family 55588897
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 55588897 |
| Family type | — |
| Earliest priority | Mar 13, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US10006839B2 — Method for flattening sample in optical metrology |
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US10006839B2 — Method for flattening sample in optical metrology (published Jun 26, 2018)
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