MEMS device and method for manufacturing the MEMS device
US-9641949-B2 · May 2, 2017 · US
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Patent family 54840028
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 54840028 |
| Family type | — |
| Earliest priority | Jun 30, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9641949B2 — MEMS device and method for manufacturing the MEMS device |
Representative publication
Best representative member for this family based on priority and filing country.
US9641949B2 — MEMS device and method for manufacturing the MEMS device (published May 2, 2017)
Member publications
Related publications in this family.
MEMS Device and Method for Manufacturing the MEMS Device
US-2015381078-A1 · Dec 31, 2015 · US