Substrate processing apparatus and substrate processing method using substrate processing apparatus
US-10580668-B2 · Mar 3, 2020 · US
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Patent family 54069596
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 54069596 |
| Family type | — |
| Earliest priority | Mar 17, 2014 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US10580668B2 — Substrate processing apparatus and substrate processing method using substrate processing apparatus |
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US10580668B2 — Substrate processing apparatus and substrate processing method using substrate processing apparatus (published Mar 3, 2020)
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