Device and method of manufacturing high aspect ratio structures
US-10923729-B2 · Feb 16, 2021 · US
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Patent family 53871826
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53871826 |
| Family type | — |
| Earliest priority | Jul 15, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10923729B2 — Device and method of manufacturing high aspect ratio structures |
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US10923729B2 — Device and method of manufacturing high aspect ratio structures (published Feb 16, 2021)
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