This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53777585 |
| Family type | — |
| Earliest priority | Feb 5, 2014 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10526266B2 — Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank provided with actinic ray-sensitive or radiation-sensitive film, photomask, pattern forming method, method for manufacturing electronic device, electronic device, compound, and method for producing compound |
Best representative member for this family based on priority and filing country.
US10526266B2 — Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank provided with actinic ray-sensitive or radiation-sensitive film, photomask, pattern forming method, method for manufacturing electronic device, electronic device, compound, and method for producing compound (published Jan 7, 2020)
Related publications in this family.
US-10526266-B2 · Jan 7, 2020 · US
US-2016280621-A1 · Sep 29, 2016 · US