Substrate processing apparatus and substrate detaching method
US-9831112-B2 · Nov 28, 2017 · US
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Patent family 53044149
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53044149 |
| Family type | — |
| Earliest priority | Nov 13, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9831112B2 — Substrate processing apparatus and substrate detaching method |
Representative publication
Best representative member for this family based on priority and filing country.
US9831112B2 — Substrate processing apparatus and substrate detaching method (published Nov 28, 2017)
Member publications
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Substrate processing apparatus and substrate detaching method
US-2015132969-A1 · May 14, 2015 · US