Selective etch for metal-containing materials
US-9711366-B2 · Jul 18, 2017 · US
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Patent family 53042829
This patent family groups 8 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 53042829 |
| Family type | — |
| Earliest priority | Nov 12, 2013 |
| First filing country | US |
| Member publications | 8 |
| Countries | US |
| Representative publication | US9711366B2 — Selective etch for metal-containing materials |
Representative publication
Best representative member for this family based on priority and filing country.
US9711366B2 — Selective etch for metal-containing materials (published Jul 18, 2017)
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Selective etch for metal-containing materials
US-9299582-B2 · Mar 29, 2016 · US
Selective etch for metal-containing materials
US-2015129545-A1 · May 14, 2015 · US
Plasma-free metal etch
US-2015129546-A1 · May 14, 2015 · US
Aluminum selective etch
US-2015129541-A1 · May 14, 2015 · US