Vapor deposition of chalcogenide-containing films
US-9543144-B2 · Jan 10, 2017 · US
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Patent family 52826537
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52826537 |
| Family type | — |
| Earliest priority | Dec 31, 2014 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9543144B2 — Vapor deposition of chalcogenide-containing films |
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US9543144B2 — Vapor deposition of chalcogenide-containing films (published Jan 10, 2017)
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