Device and method of manufacturing high-aspect ratio structures
US-10381651-B2 · Aug 13, 2019 · US
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Patent family 52633558
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52633558 |
| Family type | — |
| Earliest priority | Feb 21, 2014 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US10381651B2 — Device and method of manufacturing high-aspect ratio structures |
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US10381651B2 — Device and method of manufacturing high-aspect ratio structures (published Aug 13, 2019)
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