Method of making semiconductor device and system for performing the same
US-9639647-B2 · May 2, 2017 · US
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Patent family 52597973
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52597973 |
| Family type | — |
| Earliest priority | Sep 27, 2013 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US9639647B2 — Method of making semiconductor device and system for performing the same |
Representative publication
Best representative member for this family based on priority and filing country.
US9639647B2 — Method of making semiconductor device and system for performing the same (published May 2, 2017)
Member publications
Related publications in this family.
Method of making semiconductor device and system for performing the same
US-2015161318-A1 · Jun 11, 2015 · US
Method of making semiconductor device and a control system for performing the same
US-2015095869-A1 · Apr 2, 2015 · US
Method of making semiconductor device and a control system for performing the same
US-8978003-B1 · Mar 10, 2015 · US