Slurry, polishing solution set, polishing solution, and substrate polishing method
US-10131819-B2 · Nov 20, 2018 · US
This page is not indexed by search engines while we improve data quality.
Patent family 52586563
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52586563 |
| Family type | — |
| Earliest priority | Aug 30, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10131819B2 — Slurry, polishing solution set, polishing solution, and substrate polishing method |
Representative publication
Best representative member for this family based on priority and filing country.
US10131819B2 — Slurry, polishing solution set, polishing solution, and substrate polishing method (published Nov 20, 2018)
Member publications
Related publications in this family.