Sputtering target and method for production thereof
US-9922807-B2 · Mar 20, 2018 · US
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Patent family 52279656
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52279656 |
| Family type | — |
| Earliest priority | Jul 8, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9922807B2 — Sputtering target and method for production thereof |
Representative publication
Best representative member for this family based on priority and filing country.
US9922807B2 — Sputtering target and method for production thereof (published Mar 20, 2018)
Member publications
Related publications in this family.
Sputtering Target And Method For Production Thereof
US-2016126072-A1 · May 5, 2016 · US