Method of forming fine patterns of semiconductor device
US-8999840-B2 · Apr 7, 2015 · US
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Patent family 52277415
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52277415 |
| Family type | — |
| Earliest priority | Jul 11, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US8999840B2 — Method of forming fine patterns of semiconductor device |
Representative publication
Best representative member for this family based on priority and filing country.
US8999840B2 — Method of forming fine patterns of semiconductor device (published Apr 7, 2015)
Member publications
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Method of forming fine patterns of semiconductor device
US-2015017808-A1 · Jan 15, 2015 · US