Substrate holding and rotating device, substrate processing device equipped with same, and substrate processing method
US-9962744-B2 · May 8, 2018 · US
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Patent family 52104331
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52104331 |
| Family type | — |
| Earliest priority | Jun 18, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9962744B2 — Substrate holding and rotating device, substrate processing device equipped with same, and substrate processing method |
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US9962744B2 — Substrate holding and rotating device, substrate processing device equipped with same, and substrate processing method (published May 8, 2018)
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