Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit
US-10578881-B2 · Mar 3, 2020 · US
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Patent family 52017347
This patent family groups 6 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52017347 |
| Family type | — |
| Earliest priority | Jun 28, 2013 |
| First filing country | US |
| Member publications | 6 |
| Countries | US |
| Representative publication | US10578881B2 — Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit |
Representative publication
Best representative member for this family based on priority and filing country.
US10578881B2 — Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unit (published Mar 3, 2020)
Member publications
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