Film formation system and film formation method for forming metal film
US-9909226-B2 · Mar 6, 2018 · US
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Patent family 51794908
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51794908 |
| Family type | — |
| Earliest priority | Aug 20, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9909226B2 — Film formation system and film formation method for forming metal film |
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US9909226B2 — Film formation system and film formation method for forming metal film (published Mar 6, 2018)
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