Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun
US-9570268-B2 · Feb 14, 2017 · US
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Patent family 51791666
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51791666 |
| Family type | — |
| Earliest priority | Apr 25, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9570268B2 — Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun |
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US9570268B2 — Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun (published Feb 14, 2017)
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