Film deposition device of metal film and film deposition method
US-9840786-B2 · Dec 12, 2017 · US
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Patent family 51626071
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51626071 |
| Family type | — |
| Earliest priority | Aug 7, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9840786B2 — Film deposition device of metal film and film deposition method |
Representative publication
Best representative member for this family based on priority and filing country.
US9840786B2 — Film deposition device of metal film and film deposition method (published Dec 12, 2017)
Member publications
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Film deposition device of metal film and film deposition method
US-2016177464-A1 · Jun 23, 2016 · US