Film deposition device of metal film and metal film deposition method
US-10920331-B2 · Feb 16, 2021 · US
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Patent family 51570777
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51570777 |
| Family type | — |
| Earliest priority | Aug 7, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10920331B2 — Film deposition device of metal film and metal film deposition method |
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US10920331B2 — Film deposition device of metal film and metal film deposition method (published Feb 16, 2021)
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