Integrated microelectromechanical system devices and methods for making the same
US-10298193-B2 · May 21, 2019 · US
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Patent family 51392394
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51392394 |
| Family type | — |
| Earliest priority | Aug 19, 2013 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10298193B2 — Integrated microelectromechanical system devices and methods for making the same |
Representative publication
Best representative member for this family based on priority and filing country.
US10298193B2 — Integrated microelectromechanical system devices and methods for making the same (published May 21, 2019)
Member publications
Related publications in this family.
Integrated microelectromechanical system devices and methods for making the same
US-2016036406-A1 · Feb 4, 2016 · US
Integrated microelectromechanical system devices and methods for making the same
US-9172352-B2 · Oct 27, 2015 · US
Integrated microelectromechanical system devices and methods for making the same
US-2015048902-A1 · Feb 19, 2015 · US