Method and system for gas flow mitigation of molecular contamination of optics
US-9874512-B2 · Jan 23, 2018 · US
This page is not indexed by search engines while we improve data quality.
Patent family 51391914
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51391914 |
| Family type | — |
| Earliest priority | Feb 25, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9874512B2 — Method and system for gas flow mitigation of molecular contamination of optics |
Representative publication
Best representative member for this family based on priority and filing country.
US9874512B2 — Method and system for gas flow mitigation of molecular contamination of optics (published Jan 23, 2018)
Member publications
Related publications in this family.