Sputtering target and method of producing the same
US-2016118232-A1 · Apr 28, 2016 · US
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Patent family 51391424
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51391424 |
| Family type | — |
| Earliest priority | Feb 25, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US2016118232A1 — Sputtering target and method of producing the same |
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US2016118232A1 — Sputtering target and method of producing the same (published Apr 28, 2016)
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