Evaluation method for oxide semiconductor thin film, quality control method for oxide semiconductor thin film, and evaluation element and evaluation device used in the evaluation method
US-10090208-B2 · Oct 2, 2018 · US
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Patent family 51166990
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51166990 |
| Family type | — |
| Earliest priority | Jan 11, 2013 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10090208B2 — Evaluation method for oxide semiconductor thin film, quality control method for oxide semiconductor thin film, and evaluation element and evaluation device used in the evaluation method |
Representative publication
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US10090208B2 — Evaluation method for oxide semiconductor thin film, quality control method for oxide semiconductor thin film, and evaluation element and evaluation device used in the evaluation method (published Oct 2, 2018)
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