Fabricating method of customized mask and fabricating method of semiconductor device using customized mask
US-9230866-B2 · Jan 5, 2016 · US
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Patent family 51165448
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 51165448 |
| Family type | — |
| Earliest priority | Jan 14, 2013 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9230866B2 — Fabricating method of customized mask and fabricating method of semiconductor device using customized mask |
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US9230866B2 — Fabricating method of customized mask and fabricating method of semiconductor device using customized mask (published Jan 5, 2016)
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