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Patent family 50622748

This patent family groups 5 related publications across US. Members often share priority claims or equivalent filings in different countries.

Patent family metadata
FieldValue
Family ID50622748
Family type
Earliest priorityNov 8, 2012
First filing countryUS
Member publications5
CountriesUS
Representative publicationUS12046465B2 — Substrate treatment method and substrate treatment apparatus

Representative publication

Best representative member for this family based on priority and filing country.

US12046465B2 — Substrate treatment method and substrate treatment apparatus (published Jul 23, 2024)

Member publications

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