Substrate treatment method and substrate treatment apparatus
US-12046465-B2 · Jul 23, 2024 · US
This patent family groups 5 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50622748 |
| Family type | — |
| Earliest priority | Nov 8, 2012 |
| First filing country | US |
| Member publications | 5 |
| Countries | US |
| Representative publication | US12046465B2 — Substrate treatment method and substrate treatment apparatus |
Best representative member for this family based on priority and filing country.
US12046465B2 — Substrate treatment method and substrate treatment apparatus (published Jul 23, 2024)
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