Symmetric target design in scatterometry overlay metrology
US-10591406-B2 · Mar 17, 2020 · US
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Patent family 50488762
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50488762 |
| Family type | — |
| Earliest priority | Oct 18, 2012 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10591406B2 — Symmetric target design in scatterometry overlay metrology |
Representative publication
Best representative member for this family based on priority and filing country.
US10591406B2 — Symmetric target design in scatterometry overlay metrology (published Mar 17, 2020)
Member publications
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Symmetric target design in scatterometry overlay metrology
US-9739702-B2 · Aug 22, 2017 · US
Symmetric target design in scatterometry overlay metrology
US-2016216197-A1 · Jul 28, 2016 · US
Symmetric target design in scatterometry overlay metrology
US-2015204664-A1 · Jul 23, 2015 · US