Dual endpoint detection for advanced phase shift and binary photomasks
US-10453696-B2 · Oct 22, 2019 · US
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Patent family 50477770
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50477770 |
| Family type | — |
| Earliest priority | Oct 12, 2012 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10453696B2 — Dual endpoint detection for advanced phase shift and binary photomasks |
Representative publication
Best representative member for this family based on priority and filing country.
US10453696B2 — Dual endpoint detection for advanced phase shift and binary photomasks (published Oct 22, 2019)
Member publications
Related publications in this family.
Dual endpoint detection for advanced phase shift and binary photomasks
US-2018047574-A1 · Feb 15, 2018 · US
Dual endpoint detection for advanced phase shift and binary photomasks
US-9805939-B2 · Oct 31, 2017 · US
Dual endpoint detection for advanced phase shift and binary photomasks
US-2016351403-A1 · Dec 1, 2016 · US