Target material supply apparatus for an extreme ultraviolet light source
US-9632418-B2 · Apr 25, 2017 · US
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Patent family 50474412
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50474412 |
| Family type | — |
| Earliest priority | Oct 16, 2012 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US9632418B2 — Target material supply apparatus for an extreme ultraviolet light source |
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US9632418B2 — Target material supply apparatus for an extreme ultraviolet light source (published Apr 25, 2017)
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