Portable electrostatic chuck carrier for thin substrates
US-9343347-B2 · May 17, 2016 · US
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Patent family 50233065
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 50233065 |
| Family type | — |
| Earliest priority | Sep 7, 2012 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9343347B2 — Portable electrostatic chuck carrier for thin substrates |
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US9343347B2 — Portable electrostatic chuck carrier for thin substrates (published May 17, 2016)
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