Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device
US-9551933-B2 · Jan 24, 2017 · US
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Patent family 49997469
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 49997469 |
| Family type | — |
| Earliest priority | Jul 27, 2012 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9551933B2 — Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device |
Representative publication
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US9551933B2 — Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device (published Jan 24, 2017)
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