ZnO film production system and production method using ZnO film production system having heating units and control device
US-9611545-B2 · Apr 4, 2017 · US
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Patent family 49997046
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 49997046 |
| Family type | — |
| Earliest priority | Jul 27, 2012 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9611545B2 — ZnO film production system and production method using ZnO film production system having heating units and control device |
Representative publication
Best representative member for this family based on priority and filing country.
US9611545B2 — ZnO film production system and production method using ZnO film production system having heating units and control device (published Apr 4, 2017)
Member publications
Related publications in this family.
ZnO FILM PRODUCTION DEVICE, AND PRODUCTION METHOD
US-2015225846-A1 · Aug 13, 2015 · US