Lithographic apparatus and method of manufacturing a device
US-9606445-B2 · Mar 28, 2017 · US
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Patent family 48918382
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 48918382 |
| Family type | — |
| Earliest priority | Aug 3, 2012 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US9606445B2 — Lithographic apparatus and method of manufacturing a device |
Representative publication
Best representative member for this family based on priority and filing country.
US9606445B2 — Lithographic apparatus and method of manufacturing a device (published Mar 28, 2017)
Member publications
Related publications in this family.
Lithographic Apparatus and Method of Manufacturing a Device
US-2015192861-A1 · Jul 9, 2015 · US