Dual medium filter for ion and particle filtering during semiconductor processing
US-10109505-B2 · Oct 23, 2018 · US
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Patent family 48628261
This patent family groups 3 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 48628261 |
| Family type | — |
| Earliest priority | May 23, 2012 |
| First filing country | US |
| Member publications | 3 |
| Countries | US |
| Representative publication | US10109505B2 — Dual medium filter for ion and particle filtering during semiconductor processing |
Representative publication
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US10109505B2 — Dual medium filter for ion and particle filtering during semiconductor processing (published Oct 23, 2018)
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