Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the same
US-9244344-B2 · Jan 26, 2016 · US
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Patent family 47911584
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 47911584 |
| Family type | — |
| Earliest priority | Sep 22, 2011 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9244344B2 — Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the same |
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Best representative member for this family based on priority and filing country.
US9244344B2 — Actinic ray-sensitive or radiation-sensitive resin composition, and, resist film, pattern forming method, electronic device manufacturing method, and electronic device, each using the same (published Jan 26, 2016)
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