Photoactive compound gradient photoresist
US-9859206-B2 · Jan 2, 2018 · US
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Patent family 47575813
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 47575813 |
| Family type | — |
| Earliest priority | Jul 27, 2011 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9859206B2 — Photoactive compound gradient photoresist |
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US9859206B2 — Photoactive compound gradient photoresist (published Jan 2, 2018)
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