Diblock copolymer, preparation method thereof, and method of forming nano pattern using the same
US-9493588-B2 · Nov 15, 2016 · US
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Patent family 47042003
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 47042003 |
| Family type | — |
| Earliest priority | Apr 22, 2011 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9493588B2 — Diblock copolymer, preparation method thereof, and method of forming nano pattern using the same |
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US9493588B2 — Diblock copolymer, preparation method thereof, and method of forming nano pattern using the same (published Nov 15, 2016)
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