Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device
US-9377695-B2 · Jun 28, 2016 · US
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Patent family 45562975
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 45562975 |
| Family type | — |
| Earliest priority | Feb 24, 2011 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9377695B2 — Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device |
Representative publication
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US9377695B2 — Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device (published Jun 28, 2016)
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