Substrate treatment apparatus and substrate treatment method
US-9202724-B2 · Dec 1, 2015 · US
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Patent family 42171054
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 42171054 |
| Family type | — |
| Earliest priority | Nov 20, 2008 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9202724B2 — Substrate treatment apparatus and substrate treatment method |
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US9202724B2 — Substrate treatment apparatus and substrate treatment method (published Dec 1, 2015)
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