Method and apparatus for DC voltage control on RF-powered electrode
US-9536711-B2 · Jan 3, 2017 · US
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Patent family 39794867
This patent family groups 1 related publication across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 39794867 |
| Family type | — |
| Earliest priority | Mar 30, 2007 |
| First filing country | US |
| Member publications | 1 |
| Countries | US |
| Representative publication | US9536711B2 — Method and apparatus for DC voltage control on RF-powered electrode |
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US9536711B2 — Method and apparatus for DC voltage control on RF-powered electrode (published Jan 3, 2017)
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