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Patent family 35516203

This patent family groups 7 related publications across US. Members often share priority claims or equivalent filings in different countries.

Patent family metadata
Field	Value
Family ID	35516203
Family type	—
Earliest priority	Oct 18, 2004
First filing country	US
Member publications	7
Countries	US
Representative publication	US10248033B2 — Lithographic apparatus and device manufacturing method

Representative publication

Best representative member for this family based on priority and filing country.

US10248033B2 — Lithographic apparatus and device manufacturing method (published Apr 2, 2019)

Related publications in this family.