Methods and systems for chemical mechanical planarization endpoint detection using an alternating current reference signal
US-2015371912-A1 · Dec 24, 2015 · US
Electricity
Electricity · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01L22/26 |
| Official title | — |
| Display label | Electricity (mapped technology topic) |
| Total patents | 1,807 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is declining.
| Year | Patents |
|---|---|
| 2015 | 147 |
| 2016 | 148 |
| 2017 | 194 |
| 2018 | 220 |
| 2019 | 190 |
| 2020 | 199 |
| 2021 | 161 |
| 2022 | 123 |
| 2023 | 121 |
| 2024 | 167 |
| 2025 | 114 |
| 2026 | 23 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Automated fillet inspection system with closed loop feedback and methods of use
US-2015357253-A1 · Dec 10, 2015 · US
Etching method and bevel etching apparatus
US-2015352669-A1 · Dec 10, 2015 · US
Method and system for real-time polishing recipe control
US-2015357252-A1 · Dec 10, 2015 · US
Apparatus for and method of processing substrate
US-2015325490-A1 · Nov 12, 2015 · US
Systems and methods for detecting endpoint for through-silicon via reveal applications
US-2015311129-A1 · Oct 29, 2015 · US
Method of Packaging Semiconductor Devices and Apparatus for Performing the Same
US-2015311139-A1 · Oct 29, 2015 · US
Inline residual layer detection and characterization post via post etch using CD-SEM
US-9171765-B2 · Oct 27, 2015 · US
Adjusting intensity of laser beam during laser operation on a semiconductor device
US-2015303080-A1 · Oct 22, 2015 · US
Systems and methods for chemical mechanical planarization with photoluminescence quenching
US-9165778-B2 · Oct 20, 2015 · US
Method of optimizing the quantum efficiency of a photodiode
US-2015270447-A1 · Sep 24, 2015 · US
Methods of manufacturing polyresistors with selected tcr
US-2015270328-A1 · Sep 24, 2015 · US
Semiconductor mask blanks with a compatible stop layer
US-9142423-B2 · Sep 22, 2015 · US
Etch rate detection for anti-reflective coating layer and absorber layer etching
US-9142467-B2 · Sep 22, 2015 · US
Warp correction device and warp correction method for semiconductor element substrate
US-9136192-B2 · Sep 15, 2015 · US
Method of manufacturing nitride semiconductor device, and burn-in apparatus
US-9129921-B2 · Sep 8, 2015 · US
Semiconductor devices and methods of manufacture thereof
US-9129965-B2 · Sep 8, 2015 · US
Endpointing detection for chemical mechanical polishing based on spectrometry
US-9117751-B2 · Aug 25, 2015 · US
Pattern inspection method, pattern formation control method, and pattern inspection apparatus
US-2015235911-A1 · Aug 20, 2015 · US
Covering method and organic el element manufacturing method
US-2015221709-A1 · Aug 6, 2015 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC H01L22/26?
- CPC H01L22/26 is the Cooperative Patent Classification code for “Electricity.”
- How many patents are filed under CPC H01L22/26 (Electricity)?
- Our database includes 1,807 publications tagged with this CPC code.
- Is patent activity under CPC H01L22/26 growing?
- Publication counts under this code: 167 in 2024 vs 114 in 2025 (latest complete years).