Temperature controlled secondary electrode for ion control at substrate edge
US-11424096-B2 · Aug 23, 2022 · US
Secondary emission electrodes · Cooperative Patent Classification (CPC)
Electric circuits, power, telecommunications, and semiconductors.
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | H01J2201/32 |
| Official title | Secondary emission electrodes |
| Display label | Secondary emission electrodes |
| Total patents | 4 |
Year-over-year patent counts classified under this CPC code.
Filing activity appears stable based on the most recent years.
| Year | Patents |
|---|---|
| 2018 | 1 |
| 2019 | 1 |
| 2021 | 1 |
| 2022 | 1 |
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
US-11424096-B2 · Aug 23, 2022 · US
US-2021134554-A1 · May 6, 2021 · US
US-10340129-B2 · Jul 2, 2019 · US
US-2018247802-A1 · Aug 30, 2018 · US