Substrate processing apparatus and substrate processing method
US-12529149-B2 · Jan 20, 2026 · US
Regeneration of etching compositions
Regeneration of etching compositions · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23F1/46 |
| Official title | Regeneration of etching compositions |
| Display label | Regeneration of etching compositions |
| Total patents | 39 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is rapidly growing.
| Year | Patents |
|---|---|
| 2015 | 4 |
| 2016 | 4 |
| 2017 | 1 |
| 2018 | 1 |
| 2019 | 3 |
| 2020 | 1 |
| 2021 | 1 |
| 2022 | 6 |
| 2023 | 6 |
| 2024 | 5 |
| 2025 | 6 |
| 2026 | 1 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Bowl, substrate processing apparatus, and method of manufacturing
US-12509779-B2 · Dec 30, 2025 · US
Semiconductor wafer treatment liquid containing hypochlorite ions and ph buffer
US-2025257264-A1 · Aug 14, 2025 · US
Regenerating method of removal liquid and regenerated removal liquid preliminary
US-12371798-B2 · Jul 29, 2025 · US
Lubricant for filtration containing onium ions
US-2025235805-A1 · Jul 24, 2025 · US
Apparatus and method of treating substrate
US-12297545-B2 · May 13, 2025 · US
Processing and recycling method and product of ultrathin lithium foil
US-12215431-B2 · Feb 4, 2025 · US
Processing and recycling method and product of ultrathin lithium foil
US-2024425989-A1 · Dec 26, 2024 · US
Method of manufacturing printed circuit board
US-12144122-B2 · Nov 12, 2024 · US
Onium salt-containing treatment liquid for semiconductor wafers
US-12024663-B2 · Jul 2, 2024 · US
Bowl, substrate processing apparatus, and method of manufacturing
US-2024209514-A1 · Jun 27, 2024 · US
Substrate processing apparatus and substrate processing method
US-2024035168-A1 · Feb 1, 2024 · US
Substrate processing apparatus and substrate processing method
US-2023366100-A1 · Nov 16, 2023 · US
Etching device and etching method
US-2023335419-A1 · Oct 19, 2023 · US
Method of manufacturing printed circuit board
US-2023232540-A1 · Jul 20, 2023 · US
Regenerating method of removal liquid and regenerated removal liquid
US-2023212757-A1 · Jul 6, 2023 · US
Apparatus and method of treating substrate
US-2023203672-A1 · Jun 29, 2023 · US
Wastewater treatment system and method for semiconductor fabrication process
US-2023071797-A1 · Mar 9, 2023 · US
Cleaning method and recording medium for recording cleaning program
US-11530486-B2 · Dec 20, 2022 · US
Etchant and etching method for copper-molybdenum film layer
US-2022349064-A1 · Nov 3, 2022 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23F1/46?
- CPC C23F1/46 is the Cooperative Patent Classification code for “Regeneration of etching compositions.”
- How many patents are filed under CPC C23F1/46 (Regeneration of etching compositions)?
- Our database includes 39 publications tagged with this CPC code.
- Is patent activity under CPC C23F1/46 growing?
- Publication counts under this code: 5 in 2024 vs 6 in 2025 (latest complete years).