Deposition chamber viewport assembly including replaceable transparent rod and method of using same
US-2020377996-A1 · Dec 3, 2020 · US
Means for observation of the coating process
Means for observation of the coating process · Cooperative Patent Classification (CPC)
Chemical and metallurgical processes, compounds, and materials.
Related technology areas
Mapped technology topics for this CPC code.
| Metric | Value |
|---|---|
| CPC code | C23C14/52 |
| Official title | Means for observation of the coating process |
| Display label | Means for observation of the coating process |
| Total patents | 182 |
Filing trend
Year-over-year patent counts classified under this CPC code.
Filing activity over the last five years is growing.
| Year | Patents |
|---|---|
| 2015 | 12 |
| 2016 | 6 |
| 2017 | 13 |
| 2018 | 10 |
| 2019 | 8 |
| 2020 | 17 |
| 2021 | 22 |
| 2022 | 17 |
| 2023 | 22 |
| 2024 | 23 |
| 2025 | 27 |
| 2026 | 5 |
Representative patents
Representative publications under this CPC code from precomputed stats, or recent filings when stats are unavailable.
Methods and apparatus for shutter disk assembly detection
US-10851453-B2 · Dec 1, 2020 · US
Cathode assembly, physical vapor deposition system, and method for physical vapor deposition
US-10804083-B2 · Oct 13, 2020 · US
Method and apparatus for deposition of metal nitrides
US-2020299830-A1 · Sep 24, 2020 · US
Sensor head for crystal oscillator type of film thickness monitor
US-10767987-B2 · Sep 8, 2020 · US
Substrate processing device and processing system
US-2020232090-A1 · Jul 23, 2020 · US
Ion implantation apparatus
US-2020216946-A1 · Jul 9, 2020 · US
Vacuum processing system and method for mounting a processing system
US-10648072-B2 · May 12, 2020 · US
Sensor Head for Crystal Oscillator Type of Film Thickness Monitor
US-2020103225-A1 · Apr 2, 2020 · US
Thin-film fabrication system employing mechanical stress measurement
US-10580706-B2 · Mar 3, 2020 · US
Deposition apparatus
US-10547003-B2 · Jan 28, 2020 · US
Methods and apparatus for shutter disk assembly detection
US-2019316251-A1 · Oct 17, 2019 · US
Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor
US-10400327-B2 · Sep 3, 2019 · US
Apparatus and method for film formation by physical sputtering
US-10378101-B2 · Aug 13, 2019 · US
Film coating apparatus
US-2019237613-A1 · Aug 1, 2019 · US
System and method for fabricating perovskite film for solar cell applications
US-2019218657-A1 · Jul 18, 2019 · US
Method for producing optical film
US-2019127845-A1 · May 2, 2019 · US
Sputtering apparatus and method of discriminating state thereof
US-10233536-B2 · Mar 19, 2019 · US
Apparatus and method for film formation by physical sputtering
US-2019003038-A1 · Jan 3, 2019 · US
Evaporation device and evaporation method using the same
US-2018355476-A1 · Dec 13, 2018 · US
Frequently asked questions
Answers are generated from the same data shown on this page.
- What is CPC C23C14/52?
- CPC C23C14/52 is the Cooperative Patent Classification code for “Means for observation of the coating process.”
- How many patents are filed under CPC C23C14/52 (Means for observation of the coating process)?
- Our database includes 182 publications tagged with this CPC code.
- Is patent activity under CPC C23C14/52 growing?
- Publication counts under this code: 23 in 2024 vs 27 in 2025 (latest complete years).