Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor

Patent metadata

Field	Value
Publication number	US-10400327-B2
Application number	US-201615007181-A
Country	US
Kind code	B2
Filing date	Jan 26, 2016
Priority date	Jan 31, 2015
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

A method of processing a substrate includes: sputtering target material for a first amount of time using a first plasma formed from an inert gas and a first amount of power; determining a first counter, based on a product of a flow rate of the inert gas, the first amount of power, and the first amount of time; sputtering a metal compound material for a second amount of time using a second plasma formed from a process gas comprising a reactive gas and an inert gas and a second amount of power; determining a second counter based on a product of a flow rate of the process gas, the second amount of power, and the second amount of time; determining a third counter; and depositing a metal compound layer onto a predetermined number of substrates, wherein a deposition time for each substrate is adjusted based on the third counter.

First claim

The invention claimed is:

1. A method of processing a substrate, comprising:
(a) sputtering target material from a metal target for a first amount of time using a first plasma formed from an inert gas and a first amount of power applied to the metal target;
(b) determining a first counter, wherein the first counter is a product of a flow rate of the inert gas provided to sputter target material from the metal target, the first amount of power applied to ignite the first plasma to sputter the target material from the metal target, and the first amount of time for which the metal target is sputtered;
(c) sputtering a metal compound material from the metal target for a second amount of time using a second plasma formed from a process gas comprising a reactive gas and an inert gas and a second amount of power applied to the metal target;
(d) determining a second counter, wherein the second counter is a product of a flow rate of the process gas provided to sputter the metal compound material from the metal target, the second amount of power applied to ignite the second plasma to sputter the metal compound material from the metal target, and the second amount of time for which the metal compound material is sputtered;
(e) determining a third counter, wherein the third counter is the first counter minus the second counter; and
(f) depositing a metal compound layer onto a predetermined number of substrates, wherein a deposition time for each substrate is adjusted based on the third counter to deposit the metal compound layer.

2. The method of claim 1 , further comprising:
(g) repeating (a)-(f) to deposit the metal compound layer onto a predetermined number of substrates after resetting the first counter and second counter.

3. The method of claim 1 , wherein (f) further comprises maintaining one or more of a thickness, a sheet resistivity (Rs), or a resistivity of the metal compound layer within a predetermined tolerance across multiple substrate runs.

4. The method of claim 1 , wherein the flow rate of the inert gas is about 5 to about 1000 sccm.

5. The method of claim 1 , wherein the inert gas is at least one of argon, xenon, or krypton.

6. The method of claim 1 , wherein the metal target is titanium or aluminum.

7. The method of claim 1 , wherein the reactive gas is a nitrogen-containing gas or an oxygen-containing gas and the inert gas is at least one of argon, xenon, or krypton.

8. The method of claim 1 , wherein the metal compound layer is titanium nitride, or aluminum nitride, or aluminum oxide.

9. The method of claim 1 , wherein the first amount of power and the second amount of power is RF power of about 50 to about 10,000 watts.

10. The method of claim 1 , wherein the first amount of time and the second amount of time is about 1 to about 100 seconds.

11. A method of processing a substrate, comprising:
(a) sputtering titanium material from a titanium target for a first amount of time using a first plasma formed from an inert gas and a first amount of power applied to the titanium target;
(b) determining a first counter, wherein the first counter is a product of a flow rate of the inert gas provided to sputter titanium material from the titanium target, the first amount of power applied to ignite the first plasma to sputter the titanium material from the titanium target, and the first amount of time for which the titanium target is sputtered;
(c) sputtering titanium nitride from the titanium target for a second amount of time using a second plasma formed from a process gas comprising an inert gas and a nitrogen-containing gas and a second amount of power applied to the titanium target;
(d) determining a second counter, wherein the second counter is a product of a flow rate of the process gas provided to sputter titanium nitride from the titanium target, the second amount of power applied to ignite the second plasma to sputter titanium nitride from the titanium target, and the second amount of time for which the titanium nitride is sputtered;
(e) determining a third counter, wherein the third counter is the first counter minus the second counter; and
(f) depositing a titanium nitride layer onto a predetermined number of substrates, wherein a deposition time for each substrate is adjusted based on the third counter to deposit the titanium nitride layer.

12. The method of claim 11 , further comprising:
(g) repeating (a)-(f) to deposit the titanium nitride layer onto a predetermined number of substrates after resetting the first counter and second counter.

13. The method of claim 11 , wherein (f) further comprises maintaining one or more of a thickness, a sheet resistivity (Rs), or a resistivity of the titanium nitride layer within a predetermined tolerance across multiple substrate runs.

14. The method of claim 11 , wherein the flow rate of the inert gas is about 5 to about 1000 sccm.

15. The method of claim 11 , wherein the inert gas is at least one of argon, xenon, or krypton.

16. The method of claim 11 , wherein the first amount of power and the second amount of power is RF power of about 50 to about 10,000 watts.

17. The method of claim 11 , wherein the first amount of time and the second amount of time is about 1 to about 100 seconds.

18. A non-transitory computer readable medium having instructions stored thereon that, when executed, cause a method for processing a substrate, the method comprising:
(a) sputtering titanium material from a titanium target for a first amount of time using a first plasma formed from an inert gas and a first amount of power applied to the titanium target;
(b) determining a first counter, wherein the first counter is a product of a flow rate of the inert gas provided to sputter titanium material from the titanium target, the first amount of power applied to ignite the first plasma to sputter the titanium material from the titanium target, and the first amount of time for which the titanium target is sputtered;
(c) sputtering titanium nitride from the titanium target for a second amount of time using a second plasma formed from a process gas comprising an inert gas and a nitrogen-containing gas and a second amount of power applied to the titanium target;
(d) determining a second counter, wherein the second counter is a product of a flow rate of the process gas provided to sputter titanium nitride from the titanium target, the second amount of power applied to ignite the second plasma to sputter titanium nitride from the titanium target, and the second amount of time for which the titanium nitride is sputtered;
(e) determining a third counter, wherein the third counter is the first counter minus the second counter; and
(f) depositing a titanium nitride layer onto a predetermined number of substrates, wherein a deposition time for each substrate is adjusted based on the third counter to deposit the titanium nitride layer.

19. The computer readable medium of claim 16 , further comprising:
(g) repeating (a)-(f) to deposit the titanium nitride layer onto a predetermined number of substrates after resetting the first counter and second counter.

20. The computer readable medium of claim 18 , wherein (f) further comprises maintaining one or more of a thickness, a sheet resistivity (Rs), or a resistivity of the titanium nitride layer within a predetermined tolerance across multiple substrate runs.

Assignees

• Applied Materials Inc

Inventors

• Chowdhury Mohammad Kamruzzaman
• Ge Zhenbin
• Allen Adolph Miller

Classifications

• H01J37/3426

  Material · CPC title

• H01J37/347

  Thickness uniformity of coated layers or desired profile of target erosion · CPC title

• H01J37/3405

  Magnetron sputtering · CPC title

• C23C14/35

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title

• H01J37/3444

  Associated circuits · CPC title